It would help to know your particulars...what kind of facility, what standard you are trying to achieve, proximity to open/exposed product, etc.
Initial thoughts - there are a few ways to "dry clean" equipment:
1. Designated brush and vacuum. This is generally sufficient, though it will depend upon your particular situation. If sanitizing is needed, you can then use a waterless sanitizer, like Purell Foodservice Surface Sanitizer.
2. Dry ice blasting. If you have stubborn buildup, or the brush and vacuum approach isn't working, dry ice blasting may work.
Just a few ideas...I'm sure there are other options out there, too.